[RMY03] Relevant diffracted orders selection in optical characterization of grating by use of neural network

Conférence Internationale avec comité de lecture : First European Scatterometry Workshop, Ile de Porquerolles, France, January 2003,

Auteurs: S. Robert , A. Mure-Ravaud , M. Yacoub , S. Thiria

motcle:

Collaboration: UPMC

BibTeX

@inproceedings {
	RMY03,
	title	=	"{Relevant diffracted orders selection in optical characterization of grating by use of neural network}",
	author	=	" S. Robert and A. Mure-Ravaud and M. Yacoub and S. Thiria ",
	booktitle	=	"{First European Scatterometry Workshop, Ile de Porquerolles, France}",
	year	=	2003,
	month	=	"January",
}