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[RMY04] Neural selection of the optimal optical signature for a rapid characterization of a submicrometer period grating
Revue Internationale avec comité de lecture : Journal Optics communications, vol. 238(4), pp. 215-228, 2004
motcle:
Résumé:
The characterization of gratings with small period-to-wavelength ratios can be achieved by solving the inverse problem of the diffraction. The use of a neural network has shown several advantages: it is a non-destructive, non-local and non-invasive method. However, although the calculation of results is instantaneous, the neural characterizations already published require the measurement of many diffracted intensities and can so need a long measurement time. We present, in this paper, a neural selection process called heuristic variable selection. This method reduces the number of diffractive efficiencies allowing a correct reconstruction of the profile shape according to an expected accuracy. In the same way, the non-redundancy of the data composing the optical signature is ensured. We relate a 1-�m period grating etched in silicon which could be characterized with only six measurements when a trapezoidal profile shape is assumed.
Collaboration:
UPMC
BibTeX
| @article { | |||
| RMY04, | |||
| title | = | "{Neural selection of the optimal optical signature for a rapid characterization of a submicrometer period grating}", | |
| author | = | "S. Robert and A. Mure-Ravaud and M. Yacoub and S. Thiria and F. Badran", | |
| journal | = | "Optics communications", | |
| year | = | 2004, | |
| volume | = | 238, | |
| number | = | 4, | |
| pages | = | "215-228", | |
| } | |||
